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. 2021 Jan 18;7:8. doi: 10.1038/s41378-020-00236-9

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 2 — a Resonance frequencies of the SPC resonator in relation to the electrode height. The electrode height needs to be higher than 5.6 µm for the device to maintain resonance in liquid. b Mode shape (enlarged) and acoustic pressure distribution of the 2-µm electrode device. The alternating positive (red color) and negative (blue color) acoustic pressures show strong acoustic radiation. c Mode shape (enlarged) and acoustic pressure distribution of the 7.6-µm electrode device. The acoustic energy is confined in a small region near the electrodes.