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. 2021 Jan 18;7:8. doi: 10.1038/s41378-020-00236-9

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 4 — a Top-view SEM image of the SPC resonator. Cross-sectional images show the inverted trapezoid and trapezoid profiles of the high aspect ratio electrode fabricated with positive (b) and negative (c) photoresists, respectively. The red and blue overlays mark the nickel electrode and the titanium protection layer deposited during the cutting by an FIB, respectively. d Impedance magnitude curves of the SPC resonators and conventional Rayleigh SAW resonators in liquid.