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UVB VCSEL structure, surface topography, and epitaxial structure. (a) Schematic structure of the UVB VCSEL. (b) Atomic force microscopy images of the as-grown metal-polar Al0.6Ga0.4N surface and (c) of the N-polar surface exposed by the electrochemical etching of the sacrificial layer. (d) As-grown epitaxial layer structure. The multilayered sacrificial layer is marked in red.
