Table 3.

Parameters of Partial Least Squares regression (PLSR) models and corresponding RMSE values (Val model optimized using simulated validation set, Exp model optimized using the experimental data).

Parameter	Lift-off		Thickness
	Val	Exp	Val	Exp
Number of components	10	4	10	3
RMSE (Val)	0.02	0.05	0.37	0.71
RMSE (Exp, 15)	1.19	0.12	20.5	1.11
RMSE (Exp, 22)	1.18	0.06	20.3	0.60
Algorithm	SIMPLS
Preprocessing	mean centering