Table 2.

Summary of actuation mechanisms for MEMS-based sensor devices

Actuation technique	Technology/device	Operation principle	Applications	Year	Refs.
Electrostatic	BioMEMS sensor	Capacitive based Interdigitated electrodes (IDE)	Biosensor application	2019	[56]
Electrostatic	Microcantilever -based MEMS sensors	Capacitive sensing	Humidity Sensor	2019	[57]
Electrostatic	MEMS nanopositioning system	Sigma-delta type arrangement	Nanopositioner	2016	[58]
Electrostatic	Bistable MEMS switch	Pull-in voltage	Switch applications	2016	[59]
Electrostatic	MEMS resonators	Parallel-plate model	closed-loop noise of MEMS oscillators	2016	[60]
Electrostatic	MEMS gyroscope	Comb drives or parallel plate capacitors	Navigation (automobile GPS)	2016	[62]
Electrostatic	CMOS-MEMS resonator	Interdigitated comb actuator	Mass-Sensitive Gas Sensors	2014	[63]
Electrostatic	CMOS-MEMS resonator		Biomarker Detection in Exhaled Breath	2015	[82]
Electrothermal	MEMS-based acetone vapour sensor	Different coefficients of thermal expansion (CTEs)	Diabetes screening	2018	[66]
Electrothermal	CMOS-MEMS device	Different CTEs	Humidity sensing purpose	2017	[4]
Electrothermal	MEMS resonator based filters	U-shape double-clamped beam	Filter components	2016	[67]
Electrothermal	CMOS-MEMS sensor	Different CTEs	Humidity Sensing	2015	[44]
Electrothermal	Tuneable MEMS ring resonator	Different CTEs of materials	Filtering Applications	2015	[68]
Thermo-Electric	MetalMUMPs device	Different CTEs of materials	Out-of-Plane micrometric Displacements	2014	[121]
Thermal actuation	A MEMS-based electrostatic field sensor (EFS)	Clamp-clamp beam	Modulate the external electrostatic field	2014	[122]
Electromagnetic	MEMS actuator	Lorentz force	Optical switches, and micro scanners	2015	[69]
Piezoelectric	Mass-sensor based micro-cantilevers	ZnO thin films	A bio-or chemical event detection	2019	[48]