Table 3.
Longitudinal and transverse piezoresistance coefficient of polysilicon [19]
| Parameter | P-type polysilicon | n-type polysilicon |
|---|---|---|
| πL | 58.8 × 10–11/Pa | − 45.4 × 10–11/Pa |
| πT | − 18.5 × 10–11/Pa | 34.5 × 10–11/Pa |
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