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The extended source image sizes are taken from the partially coherent simulations averaging the intensity of 104 wavefronts.
| Extended source image | |||
|---|---|---|---|
| Lens model | PSF (nm) | Horizontal (nm) | Vertical (nm) |
| Analytic equations | 199.8 | 605.6 | 204.1 |
| Single lens equivalent | 201.7 | 598.5 | 207.2 |
| CRL multi-slicing | 203.0 | 602.4 | 208.0 |
| CRL-MS + HF | 202.5 | 607.7 | 207.0 |
| CRL-MS + LF | 197.6 | 640.6 | 207.3 |
| CRL-MS + FF | 197.2 | 631.9 | 209.6 |
