Table 4. Strehl ratio calculated for the multi-slicing models (ideal and with aberrations) using the accumulated figure errors (σz) and equation (6) to equation (8) .
Non-physical values omitted. Partially coherent simulations were performed with 104 wavefronts.
| Lens model | σz (µm) | S ratioa | S ratiob | S ratioc | Coherent | Partially coherent |
|---|---|---|---|---|---|---|
| CRL-MS | 0.00 | 1.00 | 1.00 | 1.00 | 1.00 (9) | 1.00 (4) |
| CRL-MS+HF | 1.77 | 0.85 (5) | 0.86 (0) | 0.86 (5) | 0.87 (6) | 0.88 (1) |
| CRL-MS+LF | 4.91 | – | 0.19 (4) | 0.28 (2) | 0.50 (1) | 0.51 (0) |
| CRL-MS+FF | 5.22 | – | 0.13 (5) | 0.32 (7) | 0.45 (3) | 0.46 (4) |