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. 2021 Feb 3;11:2977. doi: 10.1038/s41598-021-82608-3

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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Deconvoluted XPS spectra of Si₃N₄ after 48 h autoclave treatment at 210 °C in aqueous environment with pH values of 4, 7, and 12 (cf. labels in inset); narrow scans of Si_2p, N_1s, and O_1s edges are given in (a)–(c), respectively. The fractions of different surface bond populations (cf. labels in inset) are given in graphs on the right side of each plot.