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The results of XPS analysis of the fabricated AlN films performed before and after annealing; (a–c) the O 1s peaks of the various AlN films where (a) relates to the as-grown sample, (b) the N2-annealed sample, and (c) the O2-annealed sample; (d–f) the Al 2p peaks with Al–N and Al–O sub-peaks of the different samples, with results in (d) for the as-grown sample (e), the N2-annealed sample, and (f) the O2-annealed sample.
