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. 2021 Feb 9;11:3430. doi: 10.1038/s41598-021-82753-9

Table 1.

Height and density of the nano-sized structures of PMMA as a function of the spin coating speed.

Spin coating rpm (a) 1500 (b) 1750 (c) 2000 (d) 2500
Approximate height of structure 280 nm 250 nm 180 nm 120 nm
Density of nano-sized structure 132 ea/μm2 120 ea/μm2 108 ea/μm2 100 ea/μm2