Fig. 3. Effects of array size and spatial coherence of light source.

a Calculated and measured (using coherent and incoherent sources) transmission spectra for identical metasurface arrays of varying size (from top to bottom: 300 × 300, 400 × 400, 500 × 500, and 600 × 600 μm², respectively). The spectra are offset for clarity, and each vertical division corresponds to an increment of ΔT = 0.2 in transmittance. b The Q-factors extracted from Lorentzian fits to the calculations and to the measurements shown in a. An increase in the number of nanostructures in the array results in an increase in the estimated Q-factors. Additionally, the observed Q-factor is globally larger for each array when measured using the coherent source.