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. 2021 Feb 12;12:974. doi: 10.1038/s41467-021-21196-2

Table 1.

Summary of experimentally obtained Q-factors in metasurfaces.

Mechanism Q λ (nm) Material Light source Array size (μm2) Reference
SLR 2340 1550 Au NPs Supercontinuum 600×600 This work
LSPR <10 700 Au NPs Tungs.-halogen lamp 3000 × 3000 61
SLR 25 930 Au NPs Collimated source 135 × 135 27
SLR 30 850 Au NPs Tungs.-halogen lamp 3000 × 3000 61
SLR 40–60 600 Au NPs Ellipsometer 200 × 200 28
SLR 60 800 Au NPs Tungs.-halogen lamp 35 × 35 26
SLR 150 764 Au NPs Tungs.-halogen lamp N/A 62
SLR 230 900 Au NPs Tungs.-halogen lamp ~10,000 × 10,000 63
SLR 300 1500 Au nanostripes Tungs.-halogen lamp 300 × 100 40
SLR 330 648 Ag NPs Tungs.-halogen lamp 2500 × 2500 37
SLR 430 860 Au NPs Tungs.-halogen lamp 1000 × 1000 34
Mirror image 200 5000 ITO nanorods Collimated source N/A 35
EIT 483 1380 Si Tungs.-halogen lamp 225 × 240 64
Fano resonance 65 THz Al particles THz laser 10,000 × 10,000 65
Fano resonance 100 THz Au Assym. NPs FTIR 150 × 150 66
Fano resonance 350 1000 Si N/A N/A 67
Fano resonance 600 1000 GaAs N/A N/A 67
BIC 2750 825 GaAs Laser 60 × 108 68
Quasi-BIC 18,511 1588.4 Si Laser 15 × 15 69

The results presented in this work are in bold.

Q quality factor, λ resonance wavelength, NP nanoparticle, SLR surface lattice resonance, LSPR localized surface plasmon resonance, EIT electromagnetically induced transparency, BIC bound state in the continuum.