Table 1. Benchmarking Our Monolithically Integrated HEMT and μLED Against Current State-of-the-Art μLEDs on Industry-Compatible c-Plane Substrates in Terms of 3 dB Modulation Bandwidth.

ref	device size (μm)	wavelength (nm)	current density (kA/cm2)	3 dB bandwidth (MHz)
This work	20	480	13.3	1200
(14)	24	450	16	830
(28)	30	448	14	160
(10)	44	450	4.6	440
(29)	50	480	4.58	960
(30)	72	450	1.24	245
(31)	75	500	1.13	463
(32)	75	460	0.18	1060