Figure 2.

(a) Schematic representation of PECVD deposition of Si₃N₄ on SLG without (top, dark cyan arrow) and with (bottom, orange arrows) intermediate 1L-hBN. (b) Typical Raman spectra on SLG SCs after transfer (black) after Si₃N₄ PECVD, with (orange) and without (dark cyan) 1L-hBN. The same colors are used in the correlation plots d–g. (c) Distribution of I(D)/I(G) from 800 spectra acquired on two SLG SCs, one protected (orange bars), the other exposed (dark cyan bars). Inset: optical micrographs of the two SCs, showing cracked areas in the exposed one. Scale bars 50 μm. (d) Pos(2D) as a function of Pos(G). Solid lines are linear fits of the data. (e) FWHM(2D) as a function of Pos(G). (f) FWHM(G) as a function of Pos(G). (g) A(2D)/A(G) as a function of Pos(G).