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. 2021 Jan 29;12(2):143. doi: 10.3390/mi12020143

Figure 5.

Figure 5

(a) 2D optical holographic image of the resonator, (b) 3D optical holographic image of the resonator, (c) Atomic force microscopy (AFM) image of AlN thin film, (d) X-ray diffraction patterns of AlN film.