Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Implications of blurred electron beams on inclination ζ during 3D- focused electron beam induced deposition (FEBID). ζ is plotted as function of dwell time/patterning velocity for in-focus conditions and blurred electron beams at 5 keV/28 pA. The shaded areas indicate constant vertical growth rates (see main text).
