Figure 5.

The evolution of inclination angles (a) and aspect-ratios (b) along the growth of 500 nm wide single turn helices, specified by the azimuthal angle ϕ. The top row shows SEM top view images to illustrate the successive clockwise growth of a helix together with the direction of the gas flux vector (GFV). Right column indicates the inclination angle ζ, the widths $w$ and the thicknesses $t$. Both azimuthally resolved information are given for different blur values, where DT are adapted (see legend) to achieve a target inclination angle of 45°.