Figure 6.

The impact of beam blurs on 3D helices. In contrast to in-focus conditions (a), 0 nm blur, 7 ms DT, a blurred electron beam widens the segments cross-section as intended and delays the occurrence of co-deposition (shaded red) (b), 266 nm blur, 50 ms DT. The azimuthally resolved inclination angle of the latter is shown in (d) by black circles, which reveal a general decay, which is also qualitatively evident in the SEM image in (b) (compressed upper part). That effect can be related to electron beam induced heating (see text) and can be compensated, as evident by the red triangles in (d). The corresponding SEM image in (c) clearly confirms the improved quality of the helix and furthermore reveals no lift-off co-deposit underneath (shaded yellow, compare to (b). Please note the always evident, thin ring underneath the segments, which suggests transmitting electrons in agreement with the literature.