Figure 2.

Cross section SEM micrographs of the 3C-SiC samples. (a) Cross section view of the n⁺/p 3C-SiC on SOI substrate. (b) Free-standing n⁺/p sample after etching oxide in HF and Si in KOH solution. (c) Cross section view of the p⁺/n 3C-SiC on SOI substrate. (d) Free-standing p⁺/n sample.