Table 1.

Channel depth of laser machined microchannel for various distances between the substrate and focusing lens.

Focal Distance	0.3 cm					0.68 cm					1.06 cm
/Substrates	S1	S2	S3	Avg	SE	S1	S2	S3	Avg	SE	S1	S2	S3	Avg	SE
PMMA (μm)	616	603	599	606	5.1	1030	972	998	1000	16.8	616	635	593	615	12.1
PDMS (μm)	162	162	162	162	0	220	188	227	212	12	169	156	169	165	4.33
Glass (μm)	28.3	28.3	28.3	28.3	0	62.3	62	63	62.6	0.22	28.5	28	28	28.4	0.05