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. 2021 Jan 24;12(2):124. doi: 10.3390/mi12020124

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© 2021 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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Protruding microstructures. (A) Electroplated Pt hillock. Adapted with permission from [233]. (B) Tip-shaped glass microelectrodes obtained by etching the glass substrate and by structuring the electrode metal and EPON SU-8 insulator. Adapted with permission from [239]. (C) Si-tip electrodes on a porous MEA obtained by etching the silicon substrate before structuring the electrode materials. Adapted with permission from [195]. Copyright © 2014, Springer Science Business Media New York.