Figure 5.

(Left): Schematic front edge of self-sensing cantilever with pre-fabricated Cr/Au electrodes between which a GFM Hall sensor cross has been written by FEBID, as well as a non-magnetic tip for complementary atomic force microscopy. (Right): SEM image of GFM Hall cross between Cr/Au electrodes. The Hall cross has an effective sensing area of $50\times 50$ nm${}^2$. Inset: Optical microscopy image of self-sensing cantilever with cantilever chip.