Table 1.
Parameter | [30] | [32] | Conventional [31] | Meshed Leg [31] | Extended Leg [31] | [33] | [37] | [44] |
---|---|---|---|---|---|---|---|---|
Material | Vanadium Oxide | Amorphous-Si | Amorphous-Si | Amorphous-Si | Amorphous-Si | Aluminum (CMOS) | ZnO | Cytochrome C |
N of thermocouples | 80 | 320 | 160 | 96 | NA | 32 | 6 | 184 |
Responsivity [V/W] | NA | 10 × 104 | NA | NA | NA | 1.751 × 103 | NA | 1.5 × 105 |
TCR [%/K] | −2.7 | NA | NA | NA | NA | 0.385 | −10.5 | 29 |
Time Constant [ms] | NA | NA | 10.68 | 16.66 | 4.39 | 5.27 | 0.24 | NA |
[W/K] | NA | NA | 3.7 × 10−8 | 2.4 × 10−8 | 9.1 × 10−8 | 1.41 × 10−6 | NA | NA |