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. 2021 Feb 9;12(2):172. doi: 10.3390/mi12020172

Figure 3.

Figure 3

(a) Sketch showing typical dimensions and defining the inner radius Ri and the outer radius Ro for ring-shaped counter electrodes. (b) Microscopic picture of the manufactured micro mirror fixed by the tangential beam suspension. (c) Photo of a complete device before packaging in comparison to a match; both electrodes are electrically connected via the pads on the fused silica chip used for wire bonding.