Figure 18.
Characterization of dynamic behavior by focusing and defocusing a laser spot with the FMM device onto an iris diaphragm and measuring the light intensity behind the iris diaphragm. The membrane focusing device is powered with a square wave voltage function between 0 V and 170 V, (a) measured detector output at different frequencies, (b) charging and discharging sequence for modulation frequency of 200 Hz (time axes were shifted for overlap), (c) measured modulation amplitude as function of modulation frequency and fit with an RC-model (C = 2.8 × 10−12 F, R = 6 × 107 Ω).