Table 3.
Creeping and stress cycle measurement results.
| Number of Cycles | Total Chip Deformation (µm) | Membrane Deformation (µm) | |
|---|---|---|---|
| Run1 | 0 | 4.779 | 2.505 |
| 300 | 4.737 | 2.490 | |
| 3000 | 4.755 | 2.497 | |
| 6000 | 4.763 | 2.506 | |
| Run2 | 0 | 3.402 | 2.024 |
| 1,080,000 | 3.729 | 2.221 |
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