Table 1. Parameter values used for simulation study 1.
Simulation parameter | Range | Increment |
---|---|---|
Uncertainty of position measurements (nm) | 0–20 | 2 |
Level of geometric aberration (nm) | 0–9 | 1 |
Simulation parameter | Range | Increment |
---|---|---|
Uncertainty of position measurements (nm) | 0–20 | 2 |
Level of geometric aberration (nm) | 0–9 | 1 |