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Collected charge in a single pixel as function of the position in x-y direction of a 20 keV pencil beam raster scanned with a step size of 5 µm for three different sensors: (left) GaAs:Cr 2016 (center) GaAs:Cr 2017 (right) Silicon. The z-axis indicates the normalized integrated charge. The minimum of the z-axis is fixed to 5% for a better comprehensibility as it removes contributions from scattered photons and auto fluorescence.
