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. 2021 Mar 3;12:1408. doi: 10.1038/s41467-021-21624-3

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a Artist view of the demonstrated device, composed of grating couplers for light input and a MEMS reconfigurable beam splitter connected to two superconducting single-photon detectors. b False-colored SEM of the input section of our device, showing the waveguides and grating couplers, and the MEMS actuator and electrodes. c Photon count rate at a wavelength of 795 nm for the two on-chip detectors and the corresponding dark counts, normalized to their individual saturated detection. The reduced critical current in the dark count measurement of detector A is due to measurement-to-measurement fluctuations in the critical current. d Measured photon detection counts versus MEMS actuation voltage, normalized to the individual maximum transmission and power ratio (PR) between detectors. Note that the detectors feature different detection efficiencies (44.6 times higher in A, see Results section).