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Photo-patterning of 1D and 2D diffraction/transmission grating and characterization of their optical properties. (A) Designed patterns. The fabricated grating microstructures were characterized using bright-field microscopy (B), phase contrast microscopy (C) and SEM (D). (E) 2D views of grating diffraction pattern using 632.8 nm He-Ne laser at normal incidence illumination. Scale bar for A-D: 50 μm.
