Table 2.

Description of ground truth labels.

Ground truth label	Application
circularMask	Segmentation labels for atomic column segmentation (radius of the circular mask is defined in radius label)
gaussianMask	Gaussian-type labels for superresolution localization of atomic columns (the full width at half maximum of the Gaussian function is 0.2 angstrom)
noNoise	Images without noises for denoising
noBackgrounnoNoise	Images without noises and backgrounds for denoising and background removal
noNoiseNoBackgroundSuperresolution	Intensity preserving superresolution images (Gaussian-type) without noises and backgrounds for repersolution procesisng, denoising and background removal
noNoiseNoBckgroundUpinterpolation2x	Intensity preserving images without noises and backgrounds with 4× more pixels for upinterpolation, denoising and background removal
noNoiseUpinterpolation2x	Intensity preserving images without noises and 4× more pixels for upinterpolation and denoising
smallcircularMask	Segmentation labels for atomic column segmentation (radius of the circular mask is defined in smallradius label)
position	(x, y) positions of each atomic columns in the image
positionRadius	(x, y, r) positions and radius of each atomic columns in the image
radius	Radius of the circularMask label is defined as $r=\sqrt{{\left(\frac{0.5\lambda }{{\alpha }_{\mathit{max}}}\right)}^2+{\left(\frac{d_{\mathit{source}}}{2}\right)}^2}$
smallRadius	70% of the radius defined above