Table 1. Summary of the different cell parameters.

Maximum pressures are dictated by the use of windows, which are the same in every cell. Maximum temperatures are limited due to the close proximity of the heater with various O-rings in the cell.

Parameter	Standard	ALD	Sulfur
Maximum pressure	20 mbar	20 mbar	20 mbar
Minimum pressure	10−6 mbar	10−6 mbar	10−6 mbar
Maximum temperature	600°C	∼400°C	600°C
Minimum temperature	−30°C	RT	RT
Windows	Si3N4 or Al (200 nm)
Gas inlet setup	Double cone	Dedicated lines	Double cone
QMS probe	Inlet and/or outlet	Outlet	Inlet and/or outlet