Table 1.
150 µm Unit Cell | 130 µm Unit Cell | 100 µm Unit Cell | ||||
---|---|---|---|---|---|---|
Design | Measured | Design | Measured | Design | Measured | |
L (µm) | 150 | 160.8 µm | 130 µm | 135.4 µm | 100 µm | 105.3 µm |
A1 (µm) | 15 | 18.5 µm | 13 µm | 17.9 µm | 10 µm | 12.5 µm |
A2 (µm) | 15 | 17.0 µm | 13 µm | 17.0 µm | 8 µm | 10.3 µm |
A3 (µm) | 10 | 13.1 µm | 8 µm | 11.5 µm | 6 µm | 9.5 µm |