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. Author manuscript; available in PMC: 2021 Sep 1.
Published in final edited form as: IEEE J Solid-State Circuits. 2020 Jul 9;55(9):2567–2582. doi: 10.1109/jssc.2020.3005816

Fig. 15.

Fig. 15.

(left) |Ze| at 5 kHz measured across the array during PtB deposition. (right) SEM images of planar hole electrodes before and after PtB deposition.