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Resist formulation, maximum spin coating speed, and desired channel height for device design.
| Title | SU-8 Formulation | Maximum Spin Coating Speed (rpm) | Desired Total Height (μm) | Desired Total Half Height (μm) | Additional Height from Previous Layer (μm) |
|---|---|---|---|---|---|
| Adhesion Layer | 2000.5–2002 | 3000 | n/a | 1.4 | n/a |
| 20% Solids | |||||
| Layer 1 | 2100 | 2000 | 250 | 125 | 125 |
| (core) | |||||
| Layer 2 | 2050 | 3250 | 350 | 175 | 50 |
| (shell) | |||||
| Layer 3 | 2050 | 3250 | 450 | 225 | 50 |
| (oil) |
