Table 3.

Impedance parameters obtained by fitting the impedance spectrum.

Etching Time (min)	Rs (Ω⋅cm2)	QCPE (Ω−1s−n cm−2)	n	R1 (Ω⋅cm2)
0	390.4	3.48′ 10−6	0.567	16,084
15	593.2	6.83 × 10−7	0.659	85,518