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. 2021 Mar 19;14(6):1505. doi: 10.3390/ma14061505

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© 2021 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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(a) Grazing incidence XRD for Y₂O_3:Eu and ZnS samples grown by ALD on Si substrates, (*) marks traces of monoclinic phase. The Y₂O_3:Eu sample was prepared with a 3:2 cycle ratio. (b) XRD spectrum for the ZnS sample measured in in-plane measurement mode. (c) XRD spectrum for the ZnS sample in the 2θ-ω measurement mode.