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(a) Morphological evolution as a function of patterning (pillar size W and gap G) and deposition rate in 5 μm tall Si microcrystals, grown at 700 °C. (b) Schematic representation of the variation in the top morphology as a function of the size l of the (001) top facet (for a given diffusion length λ) determined by the material transfer J from the (113) to the (001) facet. The effect of a lower growth rate Φ, i.e. of longer λ, is also sketched.
