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Microfabrication process flow. (a) SU-8 lithography. (b) PDMS micromolding. (c) Oxygen plasma bonding of PDMS to glass. (d) Metal introduced in its melted state into the electrode channel under positive pressure (estimated at ~13 kPa38) is applied to syringes until the electrode channel is filled with metal. (e) Final device with leads ready for electrical interface. (f)Inverted microscope image of the DEP active region.
