| Piezoelectric EH |
Convert mechanical vibrations directly to electrical energy
Simple structure
Highest energy density
No needs for separate voltage source
No needs for mechanical stops
High voltage output
Compatible with MEMS
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Poor coupling (thin films)
Limited efficiency by materials properties
High impedance output
Low current output
Charge leakage
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| Electromagnetic EH |
More reliable device
No needs for separate voltage source
No needs for mechanical stops
High current output
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Device in macro scale due to the EH mechanism associated with a certain movement distance
Low voltage output
Difficult to integrate with electronics and microsystems
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| Electrostatic EH |
Ease of fabrication and integration with MEMS
High voltage output
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Separate voltage source needed
Mechanical stops needs
Short-circuiting upon contact of electrodes
Not preferable targeting low frequencies (normally at high operating frequencies)
Off axial vibrations may cause damage (such as rotation)
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| Triboelectric EH |
High conversion efficiency
Low cost and easy fabrication method
Ample material choices
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Lower durability and stability
Lower current output
Too dependent on environment factors such as humidity
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