Table 1.

Comparison of characteristics and performance between our sensor and similar sensor structures.

Diaphragm Characteristics			MDP	Frequency	Reference
Material	Thickness	Diameter
Graphene	100 nm	125 µm	59.5 µPa/Hz1/2 @10 kHz	0.2 to 22 kHz	[29]
Graphene	10 nm	1 mm	0.77 Pa/Hz1/2 @5 Hz 33.97 μPa/Hz1/2 @10 kHz	5 Hz to 800 kHz	[30]
Graphene-silver composite	6.36 nm	80 µm	-	0.5 to 30 kHz	[31]
Graphene	4 atomic layers	147 µm	-	0.5 to 20 kHz
Graphene oxide	100 nm	1.8 mm	1.8 µPa/Hz1/2 @20 kHz	0.1 to 20 kHz	[32]
Graphene oxide	~40 nm	75 µm	478 µPa/Hz1/2 @25 kHz	20 to 100 kHz	This work