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Main characteristics of the selected sensors.
| Sample | Diameter (µm) | PMIN (kPa) |
PMAX (kPa) |
Iph @ p = 0 (µA) | Amplitude (µA) |
E/(1 − ν2) (GPa) |
Figures |
|---|---|---|---|---|---|---|---|
| M0 | 400 | 80 | 330 | 14.9 | 2.4 | 1180 ± 120 | Figure 9a |
| M1 | 410 | 0 | 280 | 26 | 2.1 | 1070 ± 100 | Figure 11a |
| M2 | 340 | 0 | 500 | 24.2 | 1.9 | 1030 ± 120 | Figure 10, Figure 11a |
| M3 | 260 | 230 | 1900 | 17 | 2.9 | 1040 ± 160 | Figure 11b |
| M4 | 230 | 0 | 2800 | 22 | 2.1 | 1050 ± 180 | Figure 11b |
| M5 | 190 | 300 | 6800 | 19.4 | 2.4 | 1230 ± 260 | Figure 12 |
