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Energy‐Dispersive X‐Ray Spectroscopy Analysis of Atomic Surface Composition of SiON, SiONP1, and SiONP2 Coating
| EDS compositional data (at %) | ||||
|---|---|---|---|---|
| Sample | Si | O | N | P |
| SiONx | 52.5 | 35.1 | 12.3 | 0 |
| SiONPx1 | 61.8 | 7.3 | 30.5 | 0.28 |
| SiONPx2 | 58.7 | 14.2 | 26.8 | 0.27 |
EDS Compositional data in units of (at %).
EDS = Energy‐dispersive X‐ray spectroscopy; SiON = silicon oxynitride; SiONP = silicon oxynitrophosphide.
