Table 2 ∣.
Live (FIB/SEM) | Snapshot (SEM only) | Photo (SEM only) | |
---|---|---|---|
Dwell Time | 200 ns | 200 ns | 1 to 2 μs |
Line integration | 1 | 1 | 1 |
Resolution | 1536 x 1024 | 3072 x 2048 | 6144 x 4096 |
Bit Depth | 8 | 8 | 8 |
A live feed is used to monitor the milling process at FIB and SEM view. For the recording purposes of milling, SEM/FIB image snapshot setting is used. Photo setting is used only for recording purpose of low2 magnification image covering a whole grid due to the high electron dose. FIB imaging should be minimized due to the non-targeted sample damaging by FIB.