U11	U22	U33	U12	U13	U23
O1	0.0276 (4)	0.0337 (5)	0.0215 (4)	−0.0028 (3)	0.0067 (3)	−0.0006 (3)
O2	0.0308 (5)	0.0430 (5)	0.0328 (5)	−0.0046 (4)	−0.0004 (4)	0.0003 (4)
N1	0.0289 (6)	0.0477 (7)	0.0315 (6)	−0.0131 (5)	0.0118 (4)	−0.0092 (5)
N2	0.0236 (5)	0.0337 (5)	0.0197 (5)	−0.0034 (4)	0.0026 (4)	0.0016 (4)
N3	0.0225 (5)	0.0315 (5)	0.0229 (5)	−0.0018 (4)	0.0040 (4)	−0.0016 (4)
C1	0.0224 (6)	0.0326 (6)	0.0280 (6)	−0.0021 (5)	0.0051 (4)	0.0011 (5)
C2	0.0266 (6)	0.0307 (6)	0.0239 (6)	−0.0007 (5)	0.0037 (4)	0.0010 (5)
C3	0.0236 (6)	0.0426 (7)	0.0269 (6)	−0.0005 (5)	0.0050 (5)	0.0022 (5)
C4	0.0288 (7)	0.0433 (8)	0.0352 (7)	−0.0101 (6)	0.0065 (5)	0.0057 (6)
C5	0.0387 (8)	0.0292 (7)	0.0428 (8)	−0.0044 (5)	0.0056 (6)	0.0025 (6)
C6	0.0295 (7)	0.0321 (7)	0.0402 (7)	0.0025 (5)	0.0078 (5)	−0.0009 (5)
C7	0.0498 (9)	0.0314 (7)	0.0344 (7)	−0.0032 (6)	0.0130 (6)	−0.0027 (5)
C8	0.0392 (9)	0.0645 (11)	0.0414 (9)	−0.0004 (7)	0.0176 (7)	−0.0055 (7)
C9	0.0250 (6)	0.0297 (6)	0.0271 (6)	0.0004 (5)	0.0052 (4)	0.0000 (5)
C10	0.0260 (6)	0.0356 (7)	0.0327 (7)	−0.0025 (5)	0.0011 (5)	−0.0009 (5)
C11	0.0358 (7)	0.0358 (7)	0.0275 (6)	−0.0008 (5)	−0.0028 (5)	−0.0015 (5)
C12	0.0411 (7)	0.0370 (7)	0.0235 (6)	−0.0008 (6)	0.0060 (5)	−0.0024 (5)
C13	0.0301 (7)	0.0313 (6)	0.0268 (6)	−0.0012 (5)	0.0079 (5)	0.0003 (5)
C14	0.0232 (6)	0.0275 (6)	0.0233 (6)	0.0009 (4)	0.0033 (4)	0.0001 (4)
C15	0.0217 (6)	0.0260 (6)	0.0236 (6)	0.0023 (4)	0.0055 (4)	0.0000 (4)
C16	0.0264 (6)	0.0335 (6)	0.0249 (6)	−0.0010 (5)	0.0081 (5)	−0.0001 (5)
C17	0.0272 (6)	0.0341 (6)	0.0286 (6)	−0.0013 (5)	0.0088 (5)	−0.0029 (5)
C18	0.0342 (7)	0.0482 (8)	0.0433 (8)	−0.0102 (6)	0.0150 (6)	−0.0046 (6)
C19	0.0250 (7)	0.0502 (9)	0.0563 (9)	−0.0075 (6)	0.0097 (6)	−0.0170 (7)
C20	0.0285 (7)	0.0471 (8)	0.0451 (8)	−0.0014 (6)	−0.0033 (6)	−0.0108 (7)