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. Author manuscript; available in PMC: 2021 Apr 23.
Published in final edited form as: Int Solid State Sens Actuators Microsyst Conf. 2015 Aug 6;2015:484–487. doi: 10.1109/transducers.2015.7180966

Figure 1:

Figure 1:

Diagram of micropackaged MEMS pressure sensor in a typical medical microsystem. The corrugated membrane is one key to keep the sensitivity and nonlinearity constant during long-term implantation.