| ψ | the sharpness tip angle of indenter |
| KC | the fracture toughness of Mono-crystalline Silicon |
| E | the elastic modulus |
| (RZ) | ten-point mean roughness |
| SSD | subsurface damage |
| RZC | the brittle-plastic transition critical value |
| RZC<100> | the brittle-plastic transition critical value along <100> orientation |
| RZC<110> | the brittle-plastic transition critical value along <110> orientation |
| μ | the depth ratio of removal depth to cutting depth |
| m | a dimensionless quantity |
| β | the elastic recovery coefficient |
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