Figure 6.

In-situ FTIR analysis of uncoated PMMA spin-coated onto Si, first, and second ALD half-reactions. Al₂O₃ coating was made from TMA and H₂O at 80 °C. A FTIR run followed each half-cycle, and between half-cycles, the reactor was purged for 10 s (republished with permission of Be Gong, from [52]; permission conveyed through Copyright Clearance Center, Inc.).