Figure 16.

XRD patterns for 800 cycles of ZnO ALD onto: Si (black) and bulk PMMA substrates with (red) and without Al₂O₃ seed layer (blue), and an XRD pattern of 1600 cycles ZnO film on bulk PMMA(grey). (a) Water contact angles (θ) of UV-illuminated ZnO deposited on bulk PMMA (red), spin-coated PMMA (blue), and Si substrates as a function of ZnO ALD cycles (black). The two right-most points represent the contact angles of ZnO deposited on 100 cycles Al₂O₃ intermediate layer (b) (reprinted with permission from [67], Copyright (2014), American Vacuum Society).